| 摘要 |
The present invention inhibits suction of dust and moisture into a drive chamber for driving a piston of a fluid pump while reducing drive load through feeding/discharging of fluid to/from the drive chamber. In the interior of a cylinder, a pressure increasing/decreasing chamber is formed between a valve unit on the cylinder head side and the piston. On the opposite side of the pressure increasing/decreasing chamber, the drive chamber is disposed. There are provided a ventilation path for communicating the drive chamber and the outside space, a fluid path connected to the feeding/discharging space of the valve unit, a merging space where the fluid path is merged with the ventilation path midway, and a fluid filter provided in the merging space. |
