| 发明名称 |
ELECTRET ELEMENT, MICROPHONE MOUNTED WITH ELECTRET ELEMENT, AND MANUFACTURING METHOD OF ELECTRET ELEMENT |
| 摘要 |
PROBLEM TO BE SOLVED: To provide an electret element having excellent electrical charge stability.SOLUTION: In an electret element 20, an electret film 2 including silicon oxide (SiO) is formed. On the electret film 2, a protective film 5 of aluminum oxide deposited by an atomic layer deposition method (ALD method) is formed.SELECTED DRAWING: Figure 2 |
| 申请公布号 |
JP2016082836(A) |
申请公布日期 |
2016.05.16 |
| 申请号 |
JP20140215229 |
申请日期 |
2014.10.22 |
| 申请人 |
NATIONAL UNIV CORP SHIZUOKA UNIV;AOI ELECTRONICS CO LTD;SAGINOMIYA SEISAKUSHO INC |
发明人 |
HASHIGUCHI GEN;NISHIMORI YUKI;ARIOKA SHINICHI;SUZUKI MASATO;ISHIBASHI KAZUNORI |
| 分类号 |
H02N1/00;H04R19/01;H04R19/04 |
主分类号 |
H02N1/00 |
| 代理机构 |
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