| 摘要 |
A displacement measuring device, comprising a pattern projecting unit, a pattern image pickup unit provided so as to be capable of relatively displacing with respect to the pattern projecting unit and a control unit, wherein the pattern projecting unit is capable of projecting a displacement detecting pattern to the pattern image pickup unit, the pattern image pickup unit is capable of picking up the displacement detecting pattern as projected, the control unit is adopted to circulate image of the displacement detecting pattern picked up by the pattern image pickup unit to the pattern projecting unit, to update the displacement detecting pattern projected by the pattern projecting unit to the displacement detecting pattern as circulated, and further to project the displacement detecting pattern as updated to the pattern image pickup unit, wherein a relative displacement between the pattern projecting unit and the pattern image pickup unit is obtained by dividing a displacement amount of the displacement detecting pattern in the image acquired by circulation by the number of circulations. |
