GLASS SUBSTRATE TRANSFER SYSTEM AND ROBOT ARM THEREOF

摘要

A glass substrate transfer system and a robot arm thereof are provided. The robot arm includes: a substrate fork, a moving assembly and a vacuum chuck. The substrate fork is for taking a glass substrate. The moving assembly is connected with the substrate fork and for making the substrate fork to be moved in a working space. The vacuum chuck is disposed on the substrate fork and for sucking the glass substrate. The vacuum chuck is formed with a fluid path, and the fluid path is contained with a cooling fluid to dissipate heat of the vacuum chuck. The glass substrate transfer system and its robot arm provided by the present invention cool the vacuum chuck in time and thus can avoid affecting the product quality caused by the vacuum chuck being overheated, and the product yield is improved.

主权项

1. A robot arm comprising:
a substrate fork, configured for taking a glass substrate; a moving assembly, connected with the substrate fork and configured for making the substrate fork to be moved in a working space; a vacuum chuck, disposed on the substrate fork and configured for sucking the glass substrate, wherein the vacuum chuck is formed with a fluid path, the fluid path is contained with a cooling fluid to dissipate heat of the vacuum chuck, and the vacuum chuck has one ring-structure or concentrically arranged multiple ring-structures; a heat-dissipating assembly, disposed at a side of the substrate fork, the moving assembly or the vacuum chuck and configured for being moved to above the vacuum chuck to dissipate heat of the vacuum chuck when the vacuum chuck is heated and does not suck the glass substrate.