IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

摘要

The present invention provides an imprint apparatus including an amplifier configured to amplify a signal of displacement between a mold and a substrate, and a control unit configured to perform alignment between the mold and the substrate based on the amplified signal, wherein the control unit performs the alignment through a first operation of moving the substrate with respect to the mold in a first direction and a second operation of moving the substrate with respect to the mold in a second direction that is opposite to the first direction, and in the first operation, the control unit sets the gain of the amplifier to a first gain and changes the gain of the amplifier from the first gain to a second gain.

主权项

1. An imprint apparatus that forms a pattern of an imprint material on a substrate using a mold, the apparatus comprising:
a detection unit configured to output a signal of displacement between the mold and the substrate by detecting positions of the mold and the substrate in a direction parallel with a surface of the substrate; an amplifier configured to amplify the signal; and a control unit configured to perform alignment between the mold and the substrate based on the signal that has been amplified by the amplifier, wherein force in one direction applied to at least one of the mold and the substrate in a case of relatively and continuously moving the mold and the substrate in the direction in a state where the mold is in contact with the imprint material increases at a first increasing rate in a first region in which the amount of movement of the substrate from an initial point, which is a position of the substrate when starting the movement, with respect to the mold does not exceed a threshold, and increases at a second increasing rate that is smaller than the first increasing rate in a second region in which the amount of movement exceeds the threshold, the control unit performs the alignment through a first operation of moving the substrate with respect to the mold in a first direction such that the amount of movement exceeds the threshold, and a second operation of moving the substrate with respect to the mold in a second direction that is opposite to the first direction by an amount of movement that does not exceed the threshold, and in the first operation, the control unit sets the gain of the amplifier to a first gain in the first region, and sets the gain of the amplifier to a second gain that is smaller than the first gain in at least a part of the second region.