发明名称 NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 A nonvolatile memory device including a floating gate formed on a tunnel oxide layer that is formed on a semiconductor substrate. The device also includes a drain region formed in the substrate adjacent to one side of the floating gate, a source region formed in the substrate adjacent to another side of the floating gate, where the source region is apart from the floating gate, and an inter-gate insulating layer formed on a portion of an active region between the source region and the floating gate and on a sidewall of the floating gate directing toward the source region, as well as on a sidewall of the floating gate directing toward the drain region. The device includes a word line formed over the floating gate and being across the substrate in one direction, and a field oxide layer interposing between the word line and the source region and between the word line and the drain region, and intersecting the word line.
申请公布号 US2009057747(A1) 申请公布日期 2009.03.05
申请号 US20080256211 申请日期 2008.10.22
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 KIM HEONG JIN
分类号 H01L29/788 主分类号 H01L29/788
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