| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a diaphragm pump capable of downsizing a pump structure, while preventing leak of gas caused by failure of a diaphragm. <P>SOLUTION: This diaphragm pump 30 is provided so that a pump case 45 arranged between a motor case 33 and a pump head 44 has a sealed structure. Thus, even if suction gas leaks out into the pump case 45 from a pump room 46 via a cutting part by fatigue and the deterioration caused in the diaphragm 42, discharge of the leaking-out gas to an external part of the pump from the pump case 45 can be avoided. Since the pump case 45 is constituted by being arranged between the pump head 44 and the motor case 33, an enlargement of the pump can be avoided. <P>COPYRIGHT: (C)2009,JPO&INPIT |
