发明名称 |
Optical waveguide and coupler apparatus and method of manufacturing the same |
摘要 |
Optical waveguide and coupler devices and methods include a trench formed in a bulk semiconductor substrate, for example, a bulk silicon substrate. A bottom cladding layer is formed in the trench, and a core region is formed on the bottom cladding layer. A reflective element, such as a distributed Bragg reflector can be formed under the coupler device and/or the waveguide device. Because the optical devices are integrated in a bulk substrate, they can be readily integrated with other devices on a chip or die in accordance with silicon photonics technology. Specifically, for example, the optical devices can be integrated in a DRAM memory circuit chip die.
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申请公布号 |
US2011133063(A1) |
申请公布日期 |
2011.06.09 |
申请号 |
US20100911415 |
申请日期 |
2010.10.25 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
JI HO-CHUL;KIM KI-NAM;HYUNG YONG-WOO;NA KYOUNG-WON;HA KYOUNG-HO;PARK YOON-DONG;BAE DAE-LOK;BOK JIN-KWON;KANG PIL-KYU;SUH SUNG-DONG;KIM SEONG-GU;SHIN DONG-JAE;JOE IN-SUNG |
分类号 |
G02B6/42;G02B6/02;G02B6/26;G02B6/34;H01L31/12 |
主分类号 |
G02B6/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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