发明名称 A 3D SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
摘要 A semiconductor device and method for fabricating a semiconductor device is disclosed. An exemplary semiconductor device includes a substrate and a 3D structure disposed over the substrate. The semiconductor device further includes a dielectric layer disposed over the 3D structure, a WFMG layer disposed over the dielectric layer, and a gate structure disposed over the WFMG layer. The gate structure traverses the 3D structure and separates a source region and a drain region of the 3D structure. The source and drain region define a channel region therebetween. The gate structure induces a stress in the channel region.
申请公布号 KR101312733(B1) 申请公布日期 2013.09.27
申请号 KR20120010860 申请日期 2012.02.02
申请人 发明人
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
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