| 摘要 |
PROBLEM TO BE SOLVED: To provide a photoelectric wiring substrate and an optical module, in which detachment between a core and a clad in an optical waveguide is reduced. SOLUTION: The photoelectric wiring substrate includes: a substrate; a lower conductive layer which is provided on the substrate and has a first uneven part on the upper surface; the optical waveguide which is provided on the first uneven part on the lower conductive layer and constituted by a lower clad, a core and an upper clad; an upper conductive layer which is provided in the optical waveguide and has a second uneven part on the lower surface so as to pinch the first uneven part and the optical waveguide; and a through electrode which is provided continuously from the lower conductive layer to the upper conductive layer so as to penetrate through the lower clad and the upper clad. COPYRIGHT: (C)2011,JPO&INPIT |
