发明名称 HEATING DEVICE AND HEATING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To make compact the size of a furnace per unit heating objects, to reduce cost, to uniformize intensive heating and heating temperatures of all heating objects, and to speed up the heating processing. <P>SOLUTION: The heating object 7 is stored below a vent member 2 being arranged in the furnace 1, and fluid which is heated by a fluid-heating means 3 is introduced into the furnace 1. Fluid, introduced into the furnace 1, is injected to the heating object 7 through a plurality of ventilation small holes 2a formed in the vent member 2, and the heating object 7 is subjected to heat treatment. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006156463(A) 申请公布日期 2006.06.15
申请号 JP20040340615 申请日期 2004.11.25
申请人 SAITAMA SHINKURAITO:KK 发明人 IRIE NORIYUKI;SAITSU MASA
分类号 H01L21/52 主分类号 H01L21/52
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