摘要 |
<p><P>PROBLEM TO BE SOLVED: To make compact the size of a furnace per unit heating objects, to reduce cost, to uniformize intensive heating and heating temperatures of all heating objects, and to speed up the heating processing. <P>SOLUTION: The heating object 7 is stored below a vent member 2 being arranged in the furnace 1, and fluid which is heated by a fluid-heating means 3 is introduced into the furnace 1. Fluid, introduced into the furnace 1, is injected to the heating object 7 through a plurality of ventilation small holes 2a formed in the vent member 2, and the heating object 7 is subjected to heat treatment. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |