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发明名称
SEMICONDUCTOR VAPOR GROWTH DEVICE
摘要
申请公布号
JPH04338636(A)
申请公布日期
1992.11.25
申请号
JP19910146483
申请日期
1991.05.15
申请人
FURUKAWA ELECTRIC CO LTD:THE
发明人
MATSUO NOZOMI;AISEI TAKESHI;KIKUTA TOSHIO
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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