摘要 |
26 VERTICAL INSTANT BLADE SET-UP ABSTRACT THE PRESENT INVENTION RELATES GENERALLY TO A VERTICAL INSTANT BLADE SET-UP FOR USE IN A DICING APPARATUS FOR DICING WORKPIECES SUCH AS THE SEMI-CONDUCTOR 5 WAFERS AND SUBSTRATES WHEREIN A QUICK AND PRECISE DISTANCE CALIBRATION BETWEEN THE EDGE OF THE BLADE AND THE SURFACE OF THE CHUCK TABLE IS ALLOWED TO CONSTANTLY CHECK BLADE EDGE ABRASION DUE TO CUTTING AND DIVIDING PROCESS BY HAVING THE SENSOR BEARN BEING POSITIONED ABOVE THE ROTARY BLADE AT ALL TIMES. (THE MOST ILLUSTRATIVE DRAWING IS
|