发明名称 A COMPOSITION OF ELETROLESS CHEMICAL COPPER PLATING FOR NANO SCALE DEVICE INTERCONNECTION
摘要 PURPOSE: A composition for eletroless chemical copper plating to form microwiring is provided to reduce a processing time by adding a stabilizer and to form microwiring. CONSTITUTION: A composition for eletroless chemical copper plating to form microwring comprises copper compound, a reducing agent, an igniting agent, a PH adjusting agent, a catalyst, a stabilizer, a promoter and surfactant. The surfactant is tetraethylammonium perfluorooctanesulphonate. The copper compound is selected from the group consisting of blue vitriol, copper nitrate, cupric chloride and formic acid copper.
申请公布号 KR20100128865(A) 申请公布日期 2010.12.08
申请号 KR20090047520 申请日期 2009.05.29
申请人 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY 发明人 LEE, HONG KEE;HUR, JIN YOUNG
分类号 C23C18/38;C23C18/16 主分类号 C23C18/38
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