| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method to improve sensibility and displacement resolution of a stylus type profiler composed of a probe balancing on a supporting point and a displacement sensor, and a stylus type profiler for surface shape measurement. <P>SOLUTION: On the basis of an equation of motion of a tip of the probe, F=I/r<SP POS="POST">2</SP>d<SP POS="POST">2</SP>z/dt<SP POS="POST">2</SP>, which holds when F is a force applied to the probe, I is a moment of inertia around the supporting point, r is a distance between the supporting point and the probe, z is a displacement of the tip of the probe and t is a time, the distance r between the supporting point and the probe is determined according to the force applied to the probe and a line connecting the supporting point and the probe tip is inclined from a horizontal line by 45 degrees so as to lower the probe tip. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
