Magnetic sensor and manufacturing method therefor

摘要

A magnetic sensor for detecting the intensity of a magnetic field in three axial directions, in which a plurality of giant magnetoresistive elements are formed on a single semiconductor substrate. A thick film is formed on the semiconductor substrate; giant magnetoresistive elements forming X-axis and Y-axis sensors are formed on a planar surface thereof; and giant magnetoresistive elements forming a Z-axis sensor are formed using slopes of channels in the thick film. Each of the slopes of the channels can be constituted of a first slope and a second slope, so that a magneto-sensitive element is formed on the second slope having a larger inclination angle. In order to optimize the slope shape and inclination with respect to each channel, it is possible to form a dummy slope that does not directly relate to the formation of the giant magnetoresistive elements.

主权项

1. A manufacturing method for a magnetic sensor comprising:
forming a planation layer that provides planation by covering a wiring layer of a semiconductor substrate; forming a passivation film on the planation layer; forming a thick film on the passivation film; forming a resist film on the thick film; partially removing the resist film; performing etching on the resist film and the thick film, thus forming a plurality of channels in the thick film; forming an opening in the thick film to form a via; forming a wiring film on a planar surface of the thick film as well as slopes, top portions, and bottom portions of the channels; connecting the wiring film to a conductive portion of the via; forming magneto-sensitive elements on the slopes of the channels; and connecting the wiring film to the magneto-sensitive elements.