| 主权项 |
1. A deposition system comprising:
a housing that defines an enclosed deposition chamber; a roll conveyor located within the deposition chamber to convey a substrate along a direction of conveyance, the roll conveyor comprising a plurality of rollers having an elongated length perpendicular to the direction of conveyance for supporting the substrate and a plurality of roller shafts having an elongated length perpendicular to the direction of conveyance for supporting and driving the plurality of rollers, wherein the plurality of roller shafts are longer than the plurality of rollers and have end portions at both ends their elongated length that extend beyond the elongated lengths of each of the plurality of rollers; a deposition source located within the deposition chamber above the roll conveyor to provide a vapor deposition of a coating on the conveyed substrate; at least one shielding cable with a collecting surface positioned within the deposition chamber for shielding the roll conveyor from overspray material from the deposition source, wherein, the shielding cable is capable of multi-direction motion for shielding at least between adjacent ones of the plurality of rollers, between adjacent ones of the plurality of roller shafts and at the end portions of the plurality of roller shafts to thereby reduce material buildup on the roller; and the housing comprising an entry through which substrates to be coated are introduced into the deposition chamber and an exit through which the coated substrate leaves the deposition chamber. |
