| 摘要 |
A pattern quality management chart is provided with: a chart-use substrate comprising the same material as a substrate that is patterned by first areas having a predetermined affinity for functional liquid for patterning, and a second area having an affinity lower than the predetermined affinity; and at least one unit-area group formed upon the surface of the chart-use substrate. The unit-area group includes a plurality of unit areas which each comprise a first area surrounded therearound by a second area, wherein each unit area is classified into the following when functional liquid of a predetermined amount is supplied under predetermined supply conditions into the unit area: a compliant type unit area, which has a shape and a size such that the functional liquid does not overflow into the surrounding second area and such that the entirety of the unit area is filled with the functional liquid; and a non-compliant type unit area, which has a shape and a size such that a portion of the functional liquid overflows into the surrounding second area and/or part of the unit area is not filled with the functional liquid. The plurality of unit areas include at least one compliant type unit area and at least one non-compliant type unit area. |
