| 摘要 |
The invention relates to a micro heating plate device having a membrane support unit (10), a membrane (12), which at least partially spans at least one cavity (14) formed in the membrane support unit (10), and having at least one heating line (16) arranged on and/or in the membrane (12). In addition, the micro heating plate device comprises at least one reflector element (18) arranged on the inner side (12a) of the membrane (12) oriented toward the cavity (14) such that by means of the at least one reflector element (18), a heat radiation emitted by the at least one heating line (16) and/or the membrane can be reflected back onto and/or into the membrane (12), at least partially. The invention further relates to a sensor having a micro heating plate device. |
