| 摘要 |
<p>The invention provides a coating device and a coating method, which can prevent the problem of precision reduction of a foreign matter detector which is disposed near a metal hoop for detecting foreign matters on a substrate due to interferences like air flow. The coating device which conducts scanning on a substrate through a movement with respect to a thin-sheet-shaped substrate and discharges coating liquid on the surface of the substrate at least comprises a foreign matter detector which is disposed at the upstream side of the scanning direction of a discharging device and detects foreign matters on the substrate. The detector at least comprises a light projector which irradiates laser in parallel with the substrate surface, a light receiving means which receives the projected laser, and a shielding means which at least shields air flow right below the light-projecting area.</p> |
