发明名称 DRIVE DEVICE, CHARGED PARTICLE BEAM IRRADIATION APPARATUS, AND LITHOGRAPHIC APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To provide a drive device capable of reducing influence of magnetization on a magnetic shield and reducing leakage of magnetic field generated from an electromagnetic actuator through an aperture of the magnetic shield.SOLUTION: A drive device 6 includes: an electromagnetic actuator 7 for generating power by electromagnetic force; movable parts 73, 8 to be moved by the electromagnetic actuator 7; and a magnetic shield unit including a first magnetic shield 91 and a second magnetic shield 92 which are successively arranged from the side nearer to a magnetic field generation part of the electromagnetic actuator so as to surround the electromagnetic actuator. An aperture which is formed on at least one of the magnetic shields 91, 92 and into which a demagnetization coil 120 is penetrated, faces the first magnetic shield 91 or the second magnetic shield 92.</p>
申请公布号 JP2015033162(A) 申请公布日期 2015.02.16
申请号 JP20130159137 申请日期 2013.07.31
申请人 CANON INC 发明人 UCHIDA SHINJI
分类号 H02K33/04 主分类号 H02K33/04
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