Transport system for accommodating and transporting flexible substrates

摘要

This invention relates to a transport foil/film as well as a transport system for holding and transport of at least one thin flexible substrate and a corresponding method and a use of a flexible transport foil/film for holding and for transport of at least one thin, flexible substrate, the substrates being able to be fixed or being fixed at least temporarily on the transport foil/film and the transport foil/film being drivable by driving means for transport of the substrates.

主权项

1. A feed roller having a flexible transport foil/film, in combination with, at least one thin, large-area flexible substrate wound onto the feed roller, the flexible transport foil/film for accommodating and for transporting the at least one thin, flexible substrate attached to the transport foil/film, the at least one thin substrate having a thickness of less than 100 μm and a diameter of at least 10 cm, being prefabricated and formed of at least one material selected from a semiconductor and a compound semiconductor, an adhesive disposed on the transport foil/film for fixing the at least one flexible substrate at least temporarily on the transport foil/film and the transport foil/film being attachable to at least one drive roller for transporting the at least one substrate along a transport path.