| 摘要 |
揭示一种藉由形成一涂布层至经由使用负调性显影剂所形成的光阻图案之表面上其能够最小化该图案之线宽度及高度之用于形成精细图案的涂布组成物，及使用其形成精细图案之方法。该用于形成精细图案之涂布组成物包含：下式1之聚合物；及有机溶剂。;于式1中，R1为含1至20个碳原子之线性或分支烃基，或含3至20个碳原子之环状烃基，R2、R3及R5分别为氢原子或甲基，「X」为含1至3个碳原子之烃基或为不存在，R4为含1至10个碳原子及1至5个氮原子之烃基作为该聚合物之一端基，「a」为重复单位之mol%，及于式1中为100mol%。; and an organic solvent. ;In Formula 1, R1is a linear or branched hydrocarbon group having 1 to 20 carbon atoms, or a cyclic hydrocarbon group having 3 to 20 carbon atoms, R2, R3and R5is respectively a hydrogen atom or methyl group, “X” is a hydrocarbon group having 1 to 3 carbon atoms or absent, R4is a hydrocarbon group having 1 to 10 carbon atoms and 1 to 5 nitrogen atoms as a terminal of the polymer. “a” |
