发明名称 LASER APPARATUS AND METHOD OF IRRADIATING LASER BEAM USING THE SAME
摘要 A laser apparatus includes: a laser which selectively irradiates a laser beam to a portion of a target based on a laser driving voltage, where an intensity of the laser beam is substantially stabilized within about 10 nanoseconds; a stage which controls a relative location between the target and the laser based on a stage driving voltage; and a controller which applies the stage driving voltage to the stage, and applies the laser driving voltage to the laser
申请公布号 US2014360987(A1) 申请公布日期 2014.12.11
申请号 US201414291711 申请日期 2014.05.30
申请人 Samsung Display Co., LTD. 发明人 SON Hee-Geun;CHOO Byoung-Kwon;KIM Do-Yeob
分类号 B23K26/30 主分类号 B23K26/30
代理机构 代理人
主权项 1. A laser apparatus comprising: a laser which selectively irradiates a laser beam to a portion of a target based on a laser driving voltage, wherein an intensity of the laser beam is substantially stabilized within about 10 nanoseconds; a stage which controls a relative location between the target and the laser based on a stage driving voltage; and a controller which applies the stage driving voltage to the stage, and applies the laser driving voltage to the laser.
地址 Yongin-City KR