发明名称 NANODEVICE AND MANUFACTURING METHOD FOR SAME
摘要 <p>This invention is to provide a nanodevice, which is combined with an electronic device such as a diode, tunnel device and MOS transistor, integrated circuit and manufacturing method of the nanodevice. A nanodevice includes: a first insulating layer 2; one electrode 5A and the other electrode 5B provided to have a nanogap on the first insulating layer 2; a metal nanoparticle or a functional molecule provided between the one electrode 5A and the other electrode 5B; a second insulating layer 8 provided on the first insulating layer 2, and on the one electrode 5A and the other electrode 5B to embed the metal nanoparticle or the functional molecule. The second insulating layer works as a passivating layer.</p>
申请公布号 KR20140138787(A) 申请公布日期 2014.12.04
申请号 KR20147027021 申请日期 2013.02.27
申请人 JAPAN SCIENCE AND TECHNOLOGY AGENCY 发明人 MAJIMA YUTAKA;TERANISHI TOSHIHARU;MATSUMOTO KAZUHIKO;MAEHASHI KENZO;AZUMA YASUO;OHNO YASUHIDE;MAEDA KOSUKE;HACKENBERGER GUILLAUME HUBERT FREDERIC
分类号 H01L29/786;H01L21/336;H01L21/8234;H01L27/088;H01L29/06;H01L29/66;H01L51/05;H01L51/30 主分类号 H01L29/786
代理机构 代理人
主权项
地址