| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion beam machining technique which can improve the precision of ion beam machining in forming a cross section of a sample without making the time for machining longer than conventional time, and shortens the time for separating or preparing to separate a small sample piece without splitting the sample. SOLUTION: An ion beam machining device has a beam extraction axis along which an ion beam is extracted from an ion source 1 and a beam casting axis along which the ion beam is casted on a sample 11 set on a first sample stage 13, and the beam extraction axis and the beam casting axis are tilted from each other. The angle of casting the ion beam on the sample can be changed by rotating around a tilting axis a second sample stage 24 to put on a sample piece 303 taken out from the sample by ion beam machining, which realizes a tilting function of the device. A line segment on a plane perpendicular to the beam casting axis which is formed by projecting the beam extraction axis on the plane can be made at least substantially parallel with a line segment on a plane perpendicular to the beam casting axis which is formed by projecting the tilting axis of the second sample stage on the plane. COPYRIGHT: (C)2012,JPO&INPIT |
