| 摘要 |
An electrostatic chuck apparatus includes: a pedestal part including a side surface; an electrostatic chuck installed on the pedestal part, while including the side surface; an adhesive part installed between the pedestal part and the electrostatic chuck, while including the side surface containing a resin adhesive to adhere the pedestal part with electrostatic chuck; a concave part installed on the side of the pedestal part and on the side of the electrostatic chuck, on a zone including the side surface of the adhesive part, while being installed along the outer circumferences of the pedestal part, adhesive part and the electrostatic chuck; and a focus ring forcibly inserted to the concave unit, while covering the side surface of the adhesive part. |
