Test apparatus

摘要

A test apparatus that test a device under test, comprising a test head that is arranged facing the device under test and that includes a test module for testing the device under test, and a probe assembly that transmits a signal and that is arranged between the test head and the device under test. The probe assembly includes a plurality of low voltage pins arranged at prescribed intervals from each other, and a plurality of high voltage pins that are arranged such that distance between each high voltage pin and each low voltage pin is greater than the prescribed interval, and that transmit a signal with a higher voltage than a signal transmitted by the low voltage pins. All of the high voltage pins are arranged in only one of two regions formed by dividing a surface of the probe assembly in half.

主权项

1. A test apparatus that test a device under test, comprising:
a test head that is arranged facing the device under test and that includes a test module for testing the device under test; and a probe assembly that transmits a signal and that is arranged between the test head and the device under test, wherein the probe assembly includes: a plurality of low voltage pins arranged at prescribed intervals from each other; and a plurality of high voltage pins that transmit a signal with a higher voltage than a signal transmitted by the low voltage pins, and all of the high voltage pins are arranged in only a first region of two regions formed by dividing a surface of the probe assembly in half, and a second region of the two regions only includes the plurality of low voltage pins.