MAGNETICALLY SUSPENDED AND PLANE-DROVE VIBRATION ISOLATOR

摘要

A magnetically suspended and plane-drove vibration isolator with zero stiffness comprises an upper mounting plate, a lower mounting plate and a main body. A sleeve of the main body is lubricated and supported against the lower mounting plate by a magnetically suspended planar motor. A piston cylinder fitted in the sleeve is lubricated against the sleeve by a cylindrical air bearing surface. The angle degree of freedom between the upper mounting plate and the lower mounting plate is decoupled by a spherical air bearing. A position close-loop control system is formed to precisely control the relative position between the upper mounting plate and the lower mounting plate.