| 摘要 |
<p>Methods and systems for calibrating an absolute position encoder where a read head is moved relative to a scale of the absolute position encoder and the absolute position encoder is comprised of a fine scale and a coarse scale. An absolute position of a coarse scale is determined which corresponds to the measurement in a fine wavelength. An ideal coarse absolute position is determined from the fine scale measurements. A deviation between the determined coarse absolute position and the ideal coarse absolute position is then determined. The mean of the maximum positive and negative deviations from the ideal coarse scale absolute position for different intervals of the scale are then stored for the entirety of a measured range. These stored correction values are then used to correct the coarse scale values. The concept can be utilized also in a system with more than two wavelengths, for instance a fine wavelength, a medium wavelength and a coarse wavelength. <IMAGE></p> |
