| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing mirror shells of a nested shell grazing incidence mirror.SOLUTION: The present invention relates to a method of manufacturing mirror shells (11) of the nested shell grazing incidence mirror, in particular for EUV radiation and/or X-rays. In the method, a blank (1) of a bulk material is prepared and machined to form a mirror body (2) of the shell (11). Mechanical structures (3, 4) are integrated and/or attached to the mirror body (2) during and/or after the machining step. The mechanical structures (3, 4) are required for mounting and/or operating the mirror shells (11). After these steps, an optical surface (7) is formed on the mirror body (2) by diamond turning. The proposed method allows the manufacturing of mirror shells of a nested shell grazing incidence mirror at low costs with high optical quality which may also be refurbished one or several times. |
