发明名称
摘要 <p>A method of manufacturing a mask may include forming initial ribs and removing edge portions of the initial ribs to form final ribs, each of which has a top width smaller than that of the initial rib. A space between the initial ribs may be smaller than a width of a slit limited by the final ribs.</p>
申请公布号 JP5524272(B2) 申请公布日期 2014.06.18
申请号 JP20120101652 申请日期 2012.04.26
申请人 发明人
分类号 C23C14/04;G03F1/76 主分类号 C23C14/04
代理机构 代理人
主权项
地址