VAPOR DEPOSITION APPARATUS HAVING THE SAME, METHOD FOR FORMING THIN FILM USING THE SAME AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS

摘要

The present invention relates to a vapor deposition apparatus for depositing a thin film on a substrate which comprises: a cover including a receiving portion and a communicating portion, connected to the receiving portion, which is formed to the substrate direction; and a body which is disposed within the receiving portion and includes a first part and a second part, wherein the first part is disposed on a first position of the body and is connected with a first injection unit for injecting a first material to the substrate, a second part is disposed on a second position of the body and is connected with a second injection unit for injecting a second material to the substrate, and the body rotates to at least one direction for the first part and the second part to communicate alternately with the communicating portion.