| 摘要 |
PROBLEM TO BE SOLVED: To provide an irradiation device using a microwave electrodeless lamp which can be used suitably in a treatment process of an irradiated object, by improving the light intensity distribution on a light irradiation surface.SOLUTION: An irradiation device includes a microwave oscillator, a microwave cavity in which a standing-wave of microwaves from the microwave oscillator is formed, an electrodeless lamp arranged in the microwave cavity and filled with an additive for plasma formation, and a reflector for reflecting the light emitted from the electrodeless lamp to the outside while directing. At a position becoming the node of a plasma region formed in the lamp when lighting, a light diffusion area is formed on the outer periphery of the lamp in the axial direction of the lamp. |
