| 摘要 |
PROBLEM TO BE SOLVED: To provide an insulative material for semiconductor use including silica particles which can reduce a leak current.SOLUTION: An insulative material for semiconductor use comprises silicon atoms, carbon atoms, and oxygen atoms. The insulative material includes silica particles by 9.5 to 30 vol.%, exclusive of 9.5. The composition ratio (C/Si) of the carbon atoms to the silicon atoms is between 0 and 0.85, exclusive of 0. In grazing-incidence X-ray small angle scattering (GI-SAXS) measurement, the ratio (I(q)/I(q)) of a scattering intensity I(q) when the scattering vector q is 0.1 nmto a scattering intensity I(q) when the scattering vector q is 0.2 nmis 1.35 or less. |
