发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device comprises a semiconductor substrate; an element-forming region that includes semiconductor elements formed on the semiconductor substrate; a buried electrode plug formed so as to penetrate through the semiconductor substrate; and a trench-type electrode that is buried in a trench within the semiconductor substrate positioned between the element-forming region and the buried electrode plug.
申请公布号 US2014103483(A1) 申请公布日期 2014.04.17
申请号 US201314140316 申请日期 2013.12.24
申请人 ELPIDA MEMORY, INC. 发明人 OYU KIYONORI
分类号 H01L29/06;H01L23/522 主分类号 H01L29/06
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