| 摘要 |
PROBLEM TO BE SOLVED: To easily assemble a liquid discharge head having a composition where a support substrate is joined to a diaphragm.SOLUTION: A liquid discharge head includes: a nozzle plate 3; a liquid chamber substrate 11 having a plurality of partition wall parts 19; a diaphragm 12 laminated on the liquid chamber substrate 11; a piezoelectric element 2 composed of a lower electrode 13 laminated on the diaphragm, a piezoelectric film 14 and an upper electrode 15; a wiring member 17 joined to the upper electrode of the piezoelectric element; and a support substrate 8 for supporting the diaphragm. The support substrate is joined to the diaphragm via a joint wall 27 formed at a portion facing the partition wall part on the diaphragm. In a process for forming the piezoelectric element and the wiring member on the diaphragm, the joint wall is formed by laminating at least the same layers 2a, 17a as each layer of the piezoelectric element and the wiring member in the portion facing the partition wall part, and layer thickness of the wiring member is set larger than a maximum displacement amount of the piezoelectric element. |
