发明名称 POLY-SILICON TFT, POLY-SILICON ARRAY SUBSTRATE, METHODS FOR MANUFACTURING SAME, AND DISPLAY DEVICE
摘要 A poly-silicon thin film transistor (TFT), a poly-silicon array substrate, methods for manufacturing same, and a display device, so as to solve the problems of a large number of masks, a complex process, and too high cost in a manufacturing process in the prior art. The poly-silicon TFT comprises a doped region (201). The method for manufacturing a poly-silicon TFT comprises the following steps: forming a poly-silicon layer on a substrate (1), and forming a source layer (2) by adopting a patterning process; forming a first insulating layer (3); forming a via (6) exposing an active layer (2) by adopting a patterning process, a source electrode (7) and a drain electrode (8) being connected to the active layer (2) through the via (6); doping the active layer (2) by adopting a doping process through the via (6) to form the doped region (201); and forming source and drain metal layers, and forming the source electrode (7) and the drain electrode (8) by adopting the patterning process.
申请公布号 WO2014019300(A1) 申请公布日期 2014.02.06
申请号 WO2012CN84780 申请日期 2012.11.16
申请人 BOE TECHNOLOGY GROUP CO., LTD. 发明人 ZHANG, FANGZHEN
分类号 H01L29/786;G02F1/1362 主分类号 H01L29/786
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