| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrying device capable of correcting the inclination of a hand.SOLUTION: A substrate carrying device includes: a hand 10 for placing work W; a main upper link arm 21 rotatably journaling the hand 10 by a supporting shaft 21A on one end side; a sub upper link arm 22 rotatably journaling the hand 10 by the supporting shaft on one end side, and being in parallel with the main upper link arm 21 in a plane view and having generally same length as the main upper link arm 21; a main lower link arm 23 having a supporting shaft 23C on one end side which rotates in synchronization with a supporting shaft 21B on the other end side of the main upper link arm 21; and a sub lower link arm 24 having a supporting shaft 22B on one end side which rotates in synchronization with the supporting shaft 22B on the other end side of the sub upper link arm 22, being in parallel with the main lower link arm 23 in a plane view and having generally same length as the main lower link arm 23. A supporting shaft 24D on the other end side of the sub lower link arm 24 moves in a direction orthogonal to a supporting shaft direction, thereby correcting the inclination of the hand. |
