发明名称 NONLINEAR MICROSCOPE AND NONLINEAR OBSERVATION METHOD
摘要 In order to increase a resolution in an optical axis direction, one aspect of a non-linear microscopy of the present invention includes an illuminating unit (20, 19) collecting an illuminating light (L1, L2) supplied from a light source (11) on a specimen (10) and making a coherent non-linear optical process takes place at a collecting point (S1); a detecting unit (27) detecting a coherent object light (Lr) occurred in the non-linear optical process and generating a signal indicating light intensity at a light detecting part; and a controlling unit (1 5, 28) scanning a specimen plane (10A) of the specimen by the collecting point and measuring a distribution of the signal on the specimen plane; in which at least one of an optical path of the illuminating light directed from the light source toward the specimen and an optical path of the object light directed from the specimen toward the light detecting part is duplicated to a pair of optical paths, and a relationship between the pair of optical paths is set to a symmetric relationship with respect to the specimen plane.
申请公布号 EP2685239(A1) 申请公布日期 2014.01.15
申请号 EP20120755122 申请日期 2012.03.07
申请人 NIKON CORPORATION 发明人 FUKUTAKE, NAOKI
分类号 G01N21/65;G01N21/64;G02B21/00;G02B21/06;G02B21/16;G02B21/18;G02B27/58 主分类号 G01N21/65
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