| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS element which improves reliability.SOLUTION: A MEMS element includes a first electrode 12 fixed on a substrate, and a second electrode 16 arranged above the first electrode, facing the first electrode, and vertically movable. The second electrode includes second opening portions 17, 37 that penetrate from an upper surface to a lower surface of the second electrode. The first electrode includes first opening portions 13, 33 at a position corresponding to at least a part of the second opening portion, the first opening portions penetrating from an upper surface to a lower surface of the first electrode. |
