| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device which prevents peeling of an electrode formed by electroless plating, and to provide a manufacturing method of the piezoelectric device.SOLUTION: A piezoelectric device (100) is a surface mounting type piezoelectric device and comprises: a piezoelectric vibration piece (130) including a vibration part (134) vibrating at a predetermined vibration frequency; a base plate (120) where a pair of mounting terminals (124), composed of a metal film (151) formed by sputtering or vacuum vapor deposition and an electroless plating film (153) formed on a surface of the metal film and on which the piezoelectric device is mounted, is formed on one main surface and the piezoelectric vibration piece is placed on the other main surface; and a lid plate (110) where a metal film and an electroless plating film formed on a surface of the metal film by electroless plating are formed on one main surface, the lid plate sealing the vibration part with the other main surface. The electroless plating film formed on the one main surface of the base plate and the electroless plating film formed on the one main surface of the lid plate are formed so as to have the same shape and the same area. |
