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发明名称
摘要
申请公布号
JP5328704(B2)
申请公布日期
2013.10.30
申请号
JP20100067342
申请日期
2010.03.24
申请人
发明人
分类号
H01L21/205;C23C16/34;C30B29/38;H01L21/338;H01L29/778;H01L29/812
主分类号
H01L21/205
代理机构
代理人
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