发明名称 Fiber forwarding laser optical system
摘要 A laser optical system using optical fiber transmission, includes a first optical fiber for transmitting laser light emitted from a laser oscillator, a collimator lens for collimating laser light emitted from the first optical fiber, a spherical array lens including a plurality of cells for converging laser light emitted from the collimator lens into a plurality of spots, a plurality of second optical fibers each having a smaller core diameter than the first optical fiber and configured to admit the laser light converged into the corresponding spot by the spherical array lens, the second optical fibers having output ends that have mutually parallel axial lines and are arranged linearly in a single row, and a linearization optical unit for shaping laser light emitted from the second optical fibers into laser light having a linear cross section at an illuminated surface.
申请公布号 KR101322346(B1) 申请公布日期 2013.10.28
申请号 KR20127031835 申请日期 2012.04.27
申请人 发明人
分类号 B23K26/06;B23K26/08;H01L21/20;H01L21/268 主分类号 B23K26/06
代理机构 代理人
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