摘要 |
A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis. |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
NEUL, REINHARD;CLASSEN, JOHANNES;OHMS, TORSTEN;KUHLMANN, BURKHARD;FRANKE, AXEL;KOHN, OLIVER;MEISEL, DANIEL CHRISTOPH;HAUER, JOERG;GOMEZ, UDO-MARTIN;KEHR, KERSTEN |