发明名称 |
FLUORIDE FILM COATED CERMET COMPOSITE FILM COATED MEMBER AND PRODUCTION METHOD THEREOF |
摘要 |
PROBLEM TO BE SOLVED: To prevent corrosion resistance of a fluoride thermal-sprayed film from lowering due to penetrating pores, and to improve durability (service life) by improving halogen resistance of the fluoride thermal-sprayed film.SOLUTION: This fluoride cermet composite film coated member comprises an electroconductive substrate and a fluoride-based cermet composite film having such a structure that the penetrating pore part in the ceramic thermal-sprayed film of a nonconductive ceramic thermal-sprayed film formed by coating the surface of the electroconductive substrate is filled to be sealed with a nickel plating metal, and further has a fluorinated film on the surface thereof. |
申请公布号 |
JP2013147691(A) |
申请公布日期 |
2013.08.01 |
申请号 |
JP20120007706 |
申请日期 |
2012.01.18 |
申请人 |
TOCALO CO LTD |
发明人 |
HARADA YOSHIO;TOGOSHI KENICHIRO |
分类号 |
C23C4/18;C23C4/08;C23C4/10;C23C8/08;C23C8/42;C23C28/00;C25D7/00;H01L21/205;H01L21/3065 |
主分类号 |
C23C4/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|