发明名称 FLUORIDE FILM COATED CERMET COMPOSITE FILM COATED MEMBER AND PRODUCTION METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To prevent corrosion resistance of a fluoride thermal-sprayed film from lowering due to penetrating pores, and to improve durability (service life) by improving halogen resistance of the fluoride thermal-sprayed film.SOLUTION: This fluoride cermet composite film coated member comprises an electroconductive substrate and a fluoride-based cermet composite film having such a structure that the penetrating pore part in the ceramic thermal-sprayed film of a nonconductive ceramic thermal-sprayed film formed by coating the surface of the electroconductive substrate is filled to be sealed with a nickel plating metal, and further has a fluorinated film on the surface thereof.
申请公布号 JP2013147691(A) 申请公布日期 2013.08.01
申请号 JP20120007706 申请日期 2012.01.18
申请人 TOCALO CO LTD 发明人 HARADA YOSHIO;TOGOSHI KENICHIRO
分类号 C23C4/18;C23C4/08;C23C4/10;C23C8/08;C23C8/42;C23C28/00;C25D7/00;H01L21/205;H01L21/3065 主分类号 C23C4/18
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