| 摘要 |
Liquid crystal display panel manufacturing system comprises two loaders (310, 315), two process units, and transfer line. Each loader comprises two ports (a, b), and concurrently inputs and outputs substrates from a group of cassettes loaded through each port. Each process unit performs a manufacturing process for the substrates input through the corresponding loader, and transfers the substrates to the corresponding loader. The transfer line (380, 385) transfers the substrates. The two process units comprise a coater and an exposure unit. An independent claim is also included for LCD panel manufactured using the above system. The system includes a common process unit for commonly performing a manufacturing process for the substrates input from the first input loader the second input loader. The common process unit comprises a cleaner and a tester. |
