GRINDING METHOD FOR PLATE-LIKE BODY

摘要

PROBLEM TO BE SOLVED: To adjust a plate-like body to a desired thickness with simple constitution and to improve productivity more and to reduce costs as well.

SOLUTION: A grinding method for plate-like body includes the steps of: forming a ring member (93) thicker than a finish thickness of a plurality of plate-like bodies (W) on a pressure-sensitive adhesive tape (92) with a liquid member which cures by external stimulation; holding the plurality of plate-like bodies (W) on a chuck table (31) so that the center of the ring member (93) may be aligned with the center of the chuck table (31); and grinding the ring member (93) and the plurality of plate-like bodies (W) to the finish thickness by a grinding unit (4) while measuring the thickness of the ring member (93) by a height gauge (51).

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