| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a structure in which heater patterns in multi-zones do not cause continuity between each other even when a heater base material is formed with a conductive material such as graphite. <P>SOLUTION: A built-in type multi-zone heater 10 comprises: a graphite heater base material 11 having a configuration where inner/outer heater patterns 12,16 which are independently temperature controllable are combined with a space 19 interposed therebetween, and a plurality of PBN ribs 21 which are intermittently arranged in the space and connect the heater patterns. Since inner/outer heater patterns are connected with an insulative PBN ribs, the continuity between the heater patterns are prevented. The heaters have shape retention property while permitting a certain level of deformation. Consequently, there are exhibited effect of preventing breakage and damage due to thermal expansion coefficient difference of the heater base material and the rib formed of respectively different kinds of materials. <P>COPYRIGHT: (C)2013,JPO&INPIT |
