| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a suction failure. <P>SOLUTION: A spherical body suction device comprises: a suction head 11 having an adsorption face 22a in which a plurality of suction ports 23a are formed; a holding part 32 which holds solder balls 300 by a gas-permeable sheet 32d (holding surface); a movement mechanism which relatively moves the holding part 32 with respect to the suction head 11; a control section which controls the movement mechanism and executes movement processing for moving the holding part 32 along the adsorption face 22a while maintaining the state that the gas-permeable sheet 32d holding the solder balls 300 is in close vicinity to the adsorption face 22a; and a rotation mechanism which rotates the holding part 32. The holding part 32 is so formed that the cross-sectional shape of the gas-permeable sheet 32d is arc-shaped. The control section controls the rotation mechanism to execute rotation processing for rotating the holding part 32 around a specified position, which is previously specified, in interrelation with movement processing, to a direction opposite to a relative moving direction of the holding part 32 in the movement processing. <P>COPYRIGHT: (C)2013,JPO&INPIT |
